Substrate Temperature Effects on DC Sputtered Mo thin film
نویسندگان
چکیده
منابع مشابه
Effect of DC power on the AlN plasma of magnetron sputtered thin film
AlN thin films deposited at room temperature by reactive DC magnetron sputtering of Al target in pure argon and nitrogen atmosphere. Thin films were deposited on glass and silicon (Si) substrate at different DC power. The variation of DC power on the structural, electrical and optical properties of the films were investigated. Enhancement of crystallinity and conductivity was observed with incr...
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ژورنال
عنوان ژورنال: Applied Science and Convergence Technology
سال: 2017
ISSN: 2288-6559
DOI: 10.5757/asct.2017.26.1.11